Mechanical probe station with six micromanipulators for electrical characterization at low temperature.
Cascade IV-CV needle prober with variable temperature
Cascade IV-CV halfautomatic prober
Electrical charaterization at low temperature in a magentic field
TPT ball/wedge bonder
Oxford MOCVD Cluster Tool
Chemical Vapor Deposition custom build tube furnaces, used for deposition of Graphene, MoS2 and other TMD materials.
Wet benches for CMOS compatible chemical processes
Süss Mask aligner MA6
Spin coater
VTD evaporation system for various metals
Oxford Plasmalab System 100
Bruker DektakXT profilometry
Sentech SE400adv PV Spectral ellipsometer
Oxford Plasmalab System 80