Metal-Organic Chemical Vapor deposition chamber, fully encapsulated in glove-box.
Can hold up to 5‘ wafer, various solid, liquid and gaseous precursor sources, temperatures up to 1000°C
Type: Metal-Organic Chemical Vapor deposition (MOCVD) device. Reactor (actual device) made by ATV, Glovebox (encapsulation) provided by GS-Glovebox